School of Metallurgy and Environment, Central South University
Chinese National Engineering Research Center for Control & Treatment of HeavyMetal Pollution

四氟化碳(CF4)是《京都协议书》规定与管控的典型非二氧化碳超强温室气体之一。 随着铝电解、半导体等工业活动规模的不断扩大,CF4排放量持续增加,加剧了全球气候变化,影响着人类赖以生存的环境质量,同时阻碍了相关产业的可持续发展。 随着碳达峰行动方案的落实,加大 CF4等非二氧化碳温室气体的控制力度已成为我国“碳达峰碳中和” 战略目标达成的重要支撑。 本文对 CF4的来源进行了系统地分析,阐述了 CF4主要行业来源、排放特征与生成机制。 在综述了 CF4源头减排措施的基础上,分析了 CF4源头减排的局限性与末端处理的必然趋势。 重点针对 CF4的末端处理,从物理和化学处理技术两大类方向总结了深冷分离、吸附法、膜分离、热力燃烧、热催化分解、等离子体高能分解、电催化分解等七种末端处理技术,阐述了相关方法的基本原理、应用案例和技术发展现状;根据各项技术的分解效率、温度、产物、能耗等参数,对比分析了技术间的优缺点;基于末端处理技术的行业需求和应用场景,研判了 CF4末端处理技术的未来挑战。

Tetrafluoromethane (CF4) is one of the typical non-carbon dioxide gases with super stronggreenhouse effects, legally regulated by Kyoto Protocol. CF4 emissions continue to increase with thecontinuous expansion of industrial activities such as aluminum electrolysis and semiconductor, resultingin the aggravation of global climate change and deterioration of environment on which human survivaldepends, as well as the hindering of the sustainable development of related industries. Intensifying thecontrol of non-carbon dioxide greenhouse gases such as CF4 is an important part of China's " carbonpeaking and carbon neutrality goals" strategic objectives with the implementation of the action plan.Firstly, the sources of CF4 are analyzed systematically, and the main industry sources, emission char⁃acteristics and generation mechanism of CF4 are expounded in this paper. Then, the limitation of sourceemission reduction of CF4 and the inevitable trend of pipe-end treatment are emphatically analyzed aftersummarizing the status of source emission reduction measures of CF4. As for the end treatment of CF4,seven pipe-end treatment technologies, including deep-cooling separation, adsorption, membrane sep⁃aration, thermal combustion, thermal catalytic decomposition, plasma high-energy decomposition andelectrocatalytic decomposition, are summarized from the perspective of physical and chemical treatment.Meanwhile, the basic principles, application cases and development status of relevant methods are de⁃scribed. Some parameters such as temperature, decomposition product, energy consumption, as well asthe advantages and disadvantages of each technology are compared and analyzed. In the final, thefuture challenges of CF4 pipe-end treatment technology are predicted and evaluated based on the indus⁃try requirements and application scenarios.

国家自然科学基金重点项目 ( 52234011); 国家重点研发项目 ( 2022YFC3901100); 国家自然 科学基金 创新研究群 体项目(52121004)

0 引 言
1 CF4来源及源头减排
1.1 来 源
1.2 源头减排技术
2 CF4处理技术发展现状
2.1 物理处理技术
2.1.1 深冷分离法(低温精馏法)
2.1.2 吸附法
2.1.3 膜分离
2.2 化学分解技术
2.2.1 热力燃烧
2.2.2 热催化分解
2.2.3 等离子体高能分解
2.2.4 电催化分解
3 总结与展望
(1)发展低温等离子体耦合催化剂分解技术。
(2)开发长效稳定的催化剂。
(3)开发大气量CF4烟气的处理技术，考虑实际烟气复杂组分的影响。

朱烨林, 郑谐, 陈世杰, 等. 温室气体四氟化碳处理技术研究进展[J]. 能源环境保护, 2023, 37(2): 73-84.

ZHU Yelin, ZHENG Xie, CHEN Shijie, et al. Research progress on treatment technology of greenhouse gas tet⁃rafluoromethane[J]. Energy Environmental Protection, 2023, 37(2): 73-84.